Update tree-sitter parsers to 0.21 or use compat layer

[rien]

This PR updates most parsers to make use of the tree-sitter 0.21 update which uses the node-addon-api for native bindings instead of nan.

For parsers which have not updated yet, we use https://github.com/segevfiner/node-tree-sitter-compat which converts the language binding.

Notable submodule changes:

• https://github.com/OpenModelica/tree-sitter-modelica started ignoring generated files, so created a new fork https://github.com/rien/tree-sitter-modelica
• https://github.com/r-lib/tree-sitter-r fixed their issues, so switched back to their remote instead of our own fork

Closes #1486