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How it Works:
MEMS - Micro Electro-Mechanical Systems
The sensor consists of a micro-machined structure on a silicon wafer. The structure is suspended by polysilicon springs which allow it to deflect smoothly in any direction when subject to acceleration in the X, Y and/or Z axis. Deflection causes a change in capacitance between fixed plates and plates attached to the suspended structure. This change in capacitance on each axis is converted to an output voltage proportional to the acceleration on that axis.